| 摘要 |
PROBLEM TO BE SOLVED: To conform an assigned scanning area with an actual scanning area to allow accurate measurement reduced in an error, by measuring an electrostatic capacity due to temperature variation, and by correcting scanner sensitivity based on the electrostatic capacity, in a temperature-varied scanning probe microscope. SOLUTION: This scanning probe microscope for detecting interatomic force acting between a probe and a sample or a tunnel current therein is provided with a piezoelectric scanning body for scanning the probe relatively with respect to the sample, an electrostatic capacity measuring means for measuring the electrostatic capacity of the piezoelectric scanning body, and a scan voltage generation means for supplying a voltage for the scanning by the piezoelectric scanning body in response to the electrostatic capacity measured by the electrostatic capacity measuring means. COPYRIGHT: (C)2005,JPO&NCIPI
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