THICKNESS MEASURING INSTRUMENT AND THICKNESS MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a compact thickness measuring instrument of high energy efficiency and a thickness measuring method for measuring precisely a local thickness of a substance noncontactly, irrespective of a material of the measured substance, and measuring even a very thin substance or film. SOLUTION: This thickness measuring instrument for the substance M comprises: a vibration generating means 10 for generating vibration in the substance M; a vibration detecting means 13 for detecting the vibration in an inside of the substance M generated by the vibration generating means 10; and a frequency analyzing means 15 for calculating a resonance frequency of the substance M, based on the vibration detected by the vibration detecting means 13. The vibration generating means 10 is provided with a light irradiation part for emitting light of a wavelength absorbed by the substance M toward the the substance M. COPYRIGHT: (C)2005,JPO&NCIPI