| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor improving efficiency by reducing the number of lead wire connections as much as possible or eliminating the connections and by minimizing a force for suppressing vibrations of a vibrator. SOLUTION: An electrode for excitation and an electrode for detection are formed in a piezoelectric substrate 5, and the piezoelectric substrate 5 is pasted to a disciform diaphragm 4 to constitute the angular velocity sensor vibrator 2. A cover 3 is fixed to a circuit board 1 in such a way as to cover the vibrator 2. A ring-shaped projection 4c is protruded to the side of the cover and formed integrally with the diaphragm 4 in the node of the diaphragm 4. A plurality of pads 10 are formed correspondingly to the node part of the piezoelectric substrate 5 in the circuit board 1. The pads 10 are connected by a flexible conductive member 7 to a plurality of the electrodes provided for the piezoelectric substrate 5 correspondingly to each pad 10. A pressure means such as a rubber ring 8 for pressing the vibrator 2 is provided between the projection 4c and the cover 3. COPYRIGHT: (C)2005,JPO&NCIPI
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