发明名称 Thin film semiconductor device and fabrication method therefor
摘要 A relaying pad is formed in a predetermined portion in an insulation layer of the single-crystal thin film device, in a region where the single-crystal thin film device is formed. The relaying pad is for providing connection wiring through the insulator substrate. With this configuration it is possible to prevent an increase in an aspect ratio of a contact hole formed in an insulation layer in a region in which a transferred device is formed, the semiconductor device including a substrate on which the transferred device and a deposited device coexist.
申请公布号 US2005067619(A1) 申请公布日期 2005.03.31
申请号 US20040940735 申请日期 2004.09.15
申请人 SHARP KABUSHIKI KAISHA 发明人 TAKAFUJI YUTAKA;ITOGA TAKASHI;OGAWA YASUYUKI
分类号 H01L23/522;H01L21/02;H01L21/336;H01L21/762;H01L21/768;H01L21/77;H01L21/84;H01L23/52;H01L27/12;H01L29/786;(IPC1-7):H01L29/10;H01L29/76;H01L31/036;H01L31/112;G03F3/08 主分类号 H01L23/522
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