| 摘要 |
PROBLEM TO BE SOLVED: To restrain a cooling spot from being caused on a heating surface. SOLUTION: This ceramic heater is provided with: a ceramic substrate 21 with a resistance heating element 23 embedded; and a power-feeding terminal 27 having one end connected to the heating element 23 and the other end formed so as to be exposed to the outside from a surface, that is, the bottom surface opposite to the heating surface of the ceramic substrate 21; and the diameter (d) of the power-feeding terminal 27 is smaller than the width W of the resistance heating element. In the ceramic heater, the heat capacity of the power-feeding terminal 27 is small and the heat quantity of the heating element 23 is hardly radiated as compared with one where the diameter (d) of the power-feeding terminal is larger than the width W of the resistance heating element, and the power-feeding terminal 27 itself generates heat by carrying a current. Therefore, a cooling spot is prevented from being caused on the heating surface of the ceramic substrate 21. COPYRIGHT: (C)2005,JPO&NCIPI
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