| 摘要 |
PROBLEM TO BE SOLVED: To provide a functional substrate manufacturing device finely precisely forming a dot pattern by a solution containing a functional material and having high quality, and to provide a high quality functional substrate manufactured by the manufacturing device, in which the fine precise dot pattern is formed. SOLUTION: The functional substrate manufacturing device jets the solution containing the functional material to a desirable position of the substrate 14 based on solution giving information inputted by an information input means. A jetting head 11 and a laser beam irradiation means 23 are mounted on a carriage 12, the solution is given to the substrate 14 by the laser beam irradiation means 23 copying to a track formed by irradiating a laser beam, the laser beam irradiation means 23 and the jetting head 11 are separated with a space 26, and fit to a holding means so that the space 26 is made larger than the distance between the substrate 14 and the exhaust port surface of the jetting head 11. COPYRIGHT: (C)2005,JPO&NCIPI
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