| 摘要 |
PROBLEM TO BE SOLVED: To solve the following problem; it is required to improve illuminance of an image plane to attain a high throughput for an observation device and an inspection device, but since a high output is required for a light source for this purpose, the device has to be increased in size, manufacturing costs, and running costs. SOLUTION: An electric field vector is rotated by 90 degrees for the s-polarized light which is the reflected light from the light source by a 1st PBS through a 1/2 wavelength plate, and is made to be an electric field vector parallel to the p-polarized light which transmits the 1st PBS. A prism is placed so that the two luminous fluxes reflected/transmitted by/through the 1st PBS are crossing each other. A diffuser with anisotropy in a diffusion angle is placed at the position where these two luminous fluxes cross each other, and unifies the luminous fluxes and also shapes them into a circular luminous flux. This circular luminous flux of linearly polarized light is made incident to a 2nd PBS for branching into an illumination system/ a detection system, and thereby the reflection (loss) by the PBS can be minimized. COPYRIGHT: (C)2005,JPO&NCIPI
|
