发明名称 FLUORESCENT SURFACE EXPOSING METHOD AND FLUORESCENT SURFACE EXPOSING DEVICE, AND FLUORESCENT SURFACE FORMING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an exposing method and an exposing device applied for the formation of a fluorescent surface of a flat panel display, and a fluorescent surface forming method capable of forming a fluorescent surface of the flat panel display with high precision. SOLUTION: A Fresnel lens 8 for turning light for exposure 7a from a light source 6 into a parallel light 7b is arranged between a mask for exposure 4 and the light source 6, and a light sensing film at the inner plane of a substrate 3 is exposed in an intended pattern by making the Fresnel lens 8 rock in a direction of the inside of the plane by a rocking means 9. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005085579(A) 申请公布日期 2005.03.31
申请号 JP20030315772 申请日期 2003.09.08
申请人 SONY CORP 发明人 KIMOTO TOMOYUKI
分类号 H01J9/227;(IPC1-7):H01J9/227 主分类号 H01J9/227
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