| 发明名称 |
Spectral multi-beam ellipsometer has fixed polarizing elements and multiple beams within for evaluation of measured light |
| 摘要 |
<p>The spectral multi-beam ellipsometer has polarizing elements (3,4) which are fixed with respect to the ellipsometer. Several beam paths are used within the ellipsometer and spectrometers evaluate the measuring light.</p> |
| 申请公布号 |
DE202005000669(U1) |
申请公布日期 |
2005.03.31 |
| 申请号 |
DE20052000669U |
申请日期 |
2005.01.13 |
| 申请人 |
WIRSIG ARNO |
发明人 |
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| 分类号 |
G01J4/00;(IPC1-7):G01J4/00;G01N21/21 |
主分类号 |
G01J4/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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