| 摘要 |
Provided is an etched article, glass mold with a concave(or convex) part and a smooth etched surface, is provided by etching a specific part of glass substrate with a solution dissolving glass. Accordingly, the formed structures applied to optical devices have a low surface roughness. The etched article is produced by the following steps of: (i) contacting the surface of a glass substrate(10), having less than 8nm of centerline average roughness(Ra) on the surface of a substrate, with an aqueous HF solution dissolving the substrate, wherein the glass is quartz glass, non-alkali glass or soda lime silicate glass, and the surface of glass substrate is coated with a corrosion resistant Ni or Au film(20) and forms a slit-shaped hole(30) in which the etchant(HF) is flown; (ii) etching a specific part of glass; (iii) forming a semicircular concave(or convex) part(50) on the surface of the glass. The specific resistance of water used in HF solution and washing after etching is 13MФ.cm or higher. The glass structures are produced by the following steps of: (i) forming a mold-release agent on a concave part of the etched article(mold) having less than 20nm of centerline average roughness on the surface of an etched substrate; (ii) filling the concave part with fluid material and hardening, where the fluid material is resin such as thermal-hardened resin or UV-hardened resin such as epoxy, acrylic, phenol, melamine, urea, polyamide, etc.; (iv) releasing the hardened material from the mold. |
