| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To suppress uneven exposure of a photosensitized material caused by differences in wavelengths of a plurality of beams for exposing the photosensitized material, as to a device and method for light quantity adjustment. <P>SOLUTION: An optical filter 40 is prepared which is an optical filter with a transmission characteristic determined so that a prescribed constant output value is outputted from a light receiving part 20 when a beam is received through an optical filter by the receiving part 20, the beam satisfying a relation between a light quantity and a wavelength, and the relation equalizing the exposure level of the photosensitized material 1 to a predetermined prescribed constant exposure level. Respective laser beams emitted from respective laser beam irradiation parts 10A, 10B, ... are severally received through the optical filter 40 by the receiving part 20. The light quantity of each of the laser beams emitted from the irradiation parts 10A, 10B, ... is adjusted so that the output values of the laser beams outputted from the receiving part 20 equal the prescribed constant output value. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
