| 摘要 |
PROBLEM TO BE SOLVED: To provide a member for a multilayer-film mirror whose surface deformation due to internal stress is reduced without lowering its reflectivity, and also to provide a method for manufacturing the member. SOLUTION: The member for the multilayer-film mirror used in a soft X-ray range is characterized in that the multilayer mirror made of two or more materials whose refractivities are different is formed on a base material of the mirror, and a stress adjustment film for mitigating the deformation under stress is also formed in a part unirradiated with soft X rays. COPYRIGHT: (C)2005,JPO&NCIPI
|
