| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum glove box in which the occurrence of breakages of rubber gloves at the time of decompressing a body chamber is eliminated during the start-up of a device and the ventilation. SOLUTION: The vacuum glove box is provided with the body chamber 10, a glove mounting port 12 provided on the body chamber 10, the rubber glove 13 mounted to the glove mounting port 12, and a vacuum pump 7 for exhausting a pipe conduit for vacuum-drawing the body chamber made to communicate with the body chamber 10, a pipe conduit for vacuum-drawing the rubber glove made to communicate with the glove mounting port 12 part, the body chamber 10, and the glove mounting port 12 part. The upstream side of the pipe conduits 32, 32a, and 31a between the body chamber 10 and the glove mounting port 12 part is connected with a first common valve 3. The pipe conduit 31 connected to the first valve 3 is branched into two pipe conduits 31a, 31b. One branched pipe conduit is connected with the body chamber 10 via a second valve 1. The other branched pipe conduit 31a is made to communicate with the glove mounting port 12 part. COPYRIGHT: (C)2005,JPO&NCIPI
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