| 摘要 |
PROBLEM TO BE SOLVED: To provide a susceptor or a susceptor-cooling system that can uniformly cool the surface of a wafer, by canceling the temperature difference which occurs in a refrigerant flowing down through a refrigerant flow passage. SOLUTION: The refrigerant flow passage 3, composed of a plurality of annular paths 18a-18c, is formed in the susceptor by partitioning an annular hollow section formed in the susceptor by C-shaped partition strips 16a and 16b. The refrigerant flow passage 3 is constituted so that a refrigerant flowing down through two adjacent annular paths of the annular paths 18a-18c flows in opposite directions (flows as counterflows) at distances on both sides of the C-shaped parting strips 16a and 16b. COPYRIGHT: (C)2005,JPO&NCIPI |
