DIAGONALLY VAPOR-DEPOSITING APPARATUS, LIQUID CRYSTAL DISPLAY, MANUFACTURING METHOD THEREFOR, AND PROJECTION TYPE DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To form a diagonally vapor-deposited film having a uniform thickness distribution and vapor deposition-angle distribution. SOLUTION: This apparatus is equipped with a vapor deposition chamber 12 which accommodates a substrate 11 of an object to be vapor-deposited therein, and a plurality of vapor deposition sources 13 installed therein so that a main direction of emitting molecules of a vapor deposition material can be diagonal to the surface to be deposited of the substrate 11. Each of the vapor deposition sources 13 is dispersedly arranged so as to keep substantially the same posture as the others, along such a plane as to be substantially parallel to the surface to be deposited of the substrate 11. COPYRIGHT: (C)2005,JPO&NCIPI