| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring distortion values, without the need for controlling coordinates so precisely. SOLUTION: A plurality of point sources (Pa, Pb) are arranged in a prescribed positional relation on a object plane (o) of an optical system to be measured (1). Then, the arrangement positions of the plurality of point sources (Pa, Pb) are moved on the object plane (o), while the positional relation is maintained, and changes in the positional relation of a plurality of point images (Ia, Ib) are detected, which are formed on an image plane (i) of the optical system to be measured (1) and which move along with motions, and the distortion values of the optical system to be measured are calculated, based on the changes. Thus, by maintaining the positional relation of the plurality of point sources (Pa, Pb), the distortion values are obtained with high precision, even when the coordinates are not controlled so precisely. COPYRIGHT: (C)2005,JPO&NCIPI
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