BELLOWS PUMP, COATER USING THE SAME, AND RESIST COATER

摘要

PROBLEM TO BE SOLVED: To provide a high-pressure resistant bellows pump which can prevent sufficiently a deformation of a cornice when pressurized by a fluid and to provide a coater using the same and a resist coater. SOLUTION: The bellows pump includes a pump chamber 17 provided in bellows 14, a bellows protective member 30 provided out of the bellows 14 to protect the cornice from being deformed by pressurizing from an interior of the bellows 14 at a fluid discharging time. The bellows protective member 30 is formed in a flange shape, and a sectional profile of the end along an inner periphery of the flange shape is formed in a swelled state of substantially the same shape as the sectional profile of a recess part 14a at the cotraction time of the bellows 14. COPYRIGHT: (C)2005,JPO&NCIPI