| 摘要 |
PROBLEM TO BE SOLVED: To provide a molecular beam source cell that has two heaters 15 and 16 which can be heated with a single heating power source 21, thereby simplifies a power supply system, and enables an effective and appropriate control of an electric power. SOLUTION: The molecular beam source cell forms a thin film by heating and evaporating a vaporizing material accommodated in a crucible 10 with the heaters 15 and 16, emitting the molecule of the evaporated material from a molecule-emitting hole 14 of the crucible 10, and depositing the emitted molecule on the surface to be film-formed of a solid body. The molecular beam source cell has a first heater 15 for heating a vaporizing material-accommodating part 11 near to the bottom of the crucible 10, a second heater 16 for heating a molecule-emitting part 12 near to the molecule-emitting hole 14, and the single heating power source 21 for heating the first heater 15 and the second heater 16. The electric power to be supplied to one heater 15 or 16 from the heating power source 21 is controlled by a pulse width variable chopper 25. COPYRIGHT: (C)2005,JPO&NCIPI
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