Target manipulation for pulsed laser deposition

摘要

In a method and apparatus for pulsed laser deposition, a target is eroded more uniformly by employing a two-stage laser scanning process. In a first stage, a pulsed laser strikes the target along an x/y scan pattern across the surface of the target while the target is rotationally fixed. In a second stage, the target is rotated by an incremental angle. These two stages are continuously repeated in sequence throughout the pulsed laser deposition process.