VACUUM CLEANING APPARATUS AND METHOD FOR CLEANING USING THE SAME

摘要

A vacuum cleaning apparatus is provided to improve dust collecting efficiency and shorten a time interval necessary for a dust collecting process by including an air spray unit and a dust collecting unit. An air spray unit sprays air on the inside of a clean room. A dust collecting unit absorbs the particles floated by the air sprayed by the air spray unit. An air-spraying and dust-collecting unit(10) includes the air spray unit and the dust collecting unit. An air supply unit(30) is connected to the air spray unit by an air line(32). A vacuum generating unit(20) is connected to the dust collecting unit by a vacuum line(22).