| 摘要 |
PROBLEM TO BE SOLVED: To provide a non-contact sealing device, eliminating the possibility of the contact of a through-body inserted through an opening hole and a sealing member loosely fitted to the through-body and having simple construction for effectively suppressing the leakage of liquid from a liquid phase to a gas phase without using a device for moving the sealing member. SOLUTION: The sealing member 11 is loosely fitted via a gap 19 to the through-body 13 which is inserted through the opening hole 16a formed in a liquid tank 16 for holding liquid 14 constituting the liquid phase and the sealing member 11 is supported on the gas phase side of the opening hole 16a, and a heating means 12 is provided thereon for increasing the temperature of the sealing member 11. The inner periphery diameter of the sealing member is shaped gradually larger from the liquid phase side toward the gas phase side. A size H of the gap 19 between a minimum diameter portion thereof and the through-body 13 is smaller than the droplet of the liquid 14 deposited on the through-body 13. COPYRIGHT: (C)2005,JPO&NCIPI
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