| 摘要 |
PROBLEM TO BE SOLVED: To provide a small size strain sensor with high resolution and quick response in the measurement strain range as well as excellent environment resistance, equipped with elasticity and moderate hardness, and excelling also in mechanical characteristics such as abrasion resistance. SOLUTION: The strain sensor using an electric resistance changed by strain, is characterized by a composition of amorphous metal or a conductive compound, namely carbon composite film. The strain sensor comprises conductive compound such as at least one or more kinds of metal, or nitride chosen from W, Cr, Mo, Ti, Nb, Cu, Al, Hf, Fe, Ni, Ta, Zr, Co, Sn, Pb, Re, Os, Ir, Pt, Au, Ag, Mn, or these alloys. COPYRIGHT: (C)2005,JPO&NCIPI
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