| 发明名称 |
THERMOELASTICALLY ACTUATED MICRORESONATOR |
| 摘要 |
A thermoelastically actuated microresonator device comprising: a main body (14) having a cantilevered beam (12); a heating element (20) located adjacent a surface of the cantilevered beam and adjacent the main body, that may be periodically actuated to generate a periodic heat gradient across a height of the beam, thereby facilitating periodic deflection of the beam. |
| 申请公布号 |
WO2004100362(A3) |
申请公布日期 |
2005.03.31 |
| 申请号 |
WO2004IL00391 |
申请日期 |
2004.05.09 |
| 申请人 |
TECHNION RESEARCH & DEVELOPMENT FOUNDATION LTD.;ELATA, DAVID;MAHAMEED, RASHED |
发明人 |
ELATA, DAVID;MAHAMEED, RASHED |
| 分类号 |
G01P15/097;H01H1/00;H02N10/00;H03H9/02;H03H9/24 |
主分类号 |
G01P15/097 |
| 代理机构 |
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代理人 |
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| 主权项 |
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