| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a nonlinear element that can constitute a high-precision and high-contrast electrooptic device by effectively reducing the area of the element. <P>SOLUTION: The TFD element (nonlinear element) is provided with an effective element section constituted by laminating a lower electrode 14, a second insulating film 182, and an upper electrode 19 upon another. The second insulating film 182 is formed by laminating an oxidation suppressing layer 182a composed of an insulating material nonpermeable of oxygen and an insulating layer 182b upon another, and has a film thickness thinner than that of the first insulating film 181. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
