| 摘要 |
PROBLEM TO BE SOLVED: To provide a direct cooling type susceptor-cooling system that can be improved significantly in cooling efficiency, as compared with the conventional two-stage cooling type susceptor-cooling system and, in addition, can ideally cancel the temperature difference which occurs at the surface of a susceptor. SOLUTION: The susceptor-cooling system is constituted, to directly supply a mixed gas-liquid phase refrigerator refrigerant (HFC-based refrigerator refrigerant, hydrocarbon refrigerator refrigerant, carbon dioxide, or ammonia, etc.) into the refrigerant flow passage 3 of the susceptor 2 and, in addition, to make "evaporation of liquid-phase refrigerant" which is the evaporating process of a refrigerating cycle to take place in the refrigerant flow passage 3 so that the susceptor 2 functions as an evaporator. COPYRIGHT: (C)2005,JPO&NCIPI
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