| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a substrate for a transparent electrode capable of forming a substrate for a transparent electrode with stability, comprising a transparent conductive film with excellent flatness and uniform specific resistance. SOLUTION: The apparatus 1 for manufacturing a substrate for a transparent electrode forms a substrate 10 for a transparent electrode by using a spray pyrolysis method. The substrate 10 is constituted of a substrate 11 and a transparent conductive film 12 formed on the film-forming surface 11a of the substrate 11. The apparatus 1 comprises a spouting means 30 for spouting a material solution of the conductive film 12 in a spray form to the substrate 11, and a support means 20 on which the substrate 11 is placed. The support means 20 has a temperature adjusting mechanism 21 for controlling the temperature of the film-forming surface of the substrate 11, and a holding mechanism 22 for attracting the substrate 11 by suction. COPYRIGHT: (C)2005,JPO&NCIPI
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