发明名称 |
Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner |
摘要 |
In a system and a method according to the present invention, a sensor signal, such as a motor current signal, from a drive assembly of a pad conditioning system is used to control a CMP system to compensate for a change in the conditions of consumables, thereby enhancing process stability.
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申请公布号 |
US2005070209(A1) |
申请公布日期 |
2005.03.31 |
申请号 |
US20040859336 |
申请日期 |
2004.06.02 |
申请人 |
MARXSEN GERD;KRAMER JENS;STOECKGEN UWE GUNTER |
发明人 |
MARXSEN GERD;KRAMER JENS;STOECKGEN UWE GUNTER |
分类号 |
B24B7/04;B24B37/00;B24B37/04;B24B49/16;B24B53/007;B24B53/02;(IPC1-7):B24B49/00 |
主分类号 |
B24B7/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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