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发明名称
Method for forming trench isolation and semiconductor device comprising the same
摘要
申请公布号
KR100480625(B1)
申请公布日期
2005.03.31
申请号
KR20020065249
申请日期
2002.10.24
申请人
发明人
分类号
H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/76
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代理人
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