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发明名称
SUSZEPTOR FÜR DAS EPITAXIALE WACHSTUM UND EPITAXIAL-WACHSTUMSVERFAHREN
摘要
申请公布号
DE02795973(T1)
申请公布日期
2005.03.31
申请号
DE20020795973T
申请日期
2002.12.23
申请人
SUMITOMO MITSUBISHI SILICON CORP., TOKIO/TOYKO;ISHIBASHI, MASAYUKI;KRUEGER, JOHN F.;DOHI, TAKEYOSHI;HORIE, DAIZO;FUJIKAWA, TAKASHI
发明人
ISHIBASHI, MASAYUKI;KRUEGER, JOHN F.;DOMI, TAKAYUKI;HORIE, DAIZO;FUJIKAWA, TAKASHI
分类号
H01L21/205;C23C16/44;C23C16/455;C23C16/458;C30B25/12;C30B29/06;H01L21/20;H01L21/687;(IPC1-7):H01L21/20;C23C16/00
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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