摘要 |
PROBLEM TO BE SOLVED: To provide a surface-emitting laser having high heat radiation effect. SOLUTION: In the surface-emitting laser, at least a lower DBR, an active layer and an upper DBR are laminated on a semiconductor substrate, and a mesa structure is formed from the upper DBR to at least the surface of the lower DBR. A trench is formed in the semiconductor substrate directly under the mesa structure, and a high thermal conductive member is filled in the trench. COPYRIGHT: (C)2005,JPO&NCIPI
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