| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser apparatus which can minimize damage on an irradiation object due to the variation of an output even if a sensor trouble is detected and allows an operator to safely suspend or continue the present irradiation of the laser beam in accordance with contents of the damage. SOLUTION: The laser apparatus comprises a laser oscillating means 1, an output setting means 6 for setting an laser output, a driving means 11 for driving the laser oscillating means, sensors for detecting operating conditions of the laser oscillating means, an automatic control means 10 for sending the drive signal to the driving means on the basis of the signals from the output setting means and sensors, a standard characteristic storage means 14 for storing the standard value or the standard range of the signals from the sensors corresponding to each amount of control to the driving means, and a fault informing means 15. The automatic control means judges a fault condition of sensors on the basis of the signals from the sensors and the signal from the standard characteristic storage means and sends the informing signal indicating the contents of fault to the fault informing means 15. COPYRIGHT: (C)2005,JPO&NCIPI
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