发明名称 |
Method and system for automatically controlling a current distribution of a multi-anode arrangement during the plating of a metal on a substrate surface |
摘要 |
An electroplating tool is operated in combination with a controller which automatically determines the individual currents for a multi-anode configuration of the plating tool. The calculation of the anode currents may be based on sensitivity data and measurement data as well as on a desired target profile, so that a fast response with respect to process variations may be achieved even for a plating tool including a plurality of process chambers.
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申请公布号 |
US2005067290(A1) |
申请公布日期 |
2005.03.31 |
申请号 |
US20040861997 |
申请日期 |
2004.06.04 |
申请人 |
BONKASS MATTHIAS;WOLLSTEIN DIRK;PREUSSE AXEL |
发明人 |
BONKASS MATTHIAS;WOLLSTEIN DIRK;PREUSSE AXEL |
分类号 |
C25D21/12;(IPC1-7):C25D21/12 |
主分类号 |
C25D21/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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