| 摘要 |
A device for transferring substrates is provided to obtain satisfactory driving force by securing non-contact power transmission structure and securing a magnetic force action range to the utmost. A device for transferring substrates(B) includes a frame(2); plural substrate feed rollers(4) situated in a posture capable of feeding the substrates on the top of the frame; a driving part(6) for rotating the substrate feed rollers; and power transmission members(8) transmitting power of the driving part to the substrate feed rollers. The power transmission members comprise magnetic rollers installed to a driving side and a driven side in a range for power transmission, to transmit power by magnetic forces. Grooves are formed to the magnetic rollers of the driving and driven sides to make power transmission executed in a line contact state with the magnetic rollers corresponding to each other.
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