| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a color filter substrate by which a prescribed position of a transparent conductive film of the color filter substrate where a black matrix, coloring pixels and the transparent conductive film are formed on a glass substrate, is easily etched and removed by using a laser beam without damaging a base and to provide the color filter substrate. <P>SOLUTION: The transparent conductive film 14 is deposited on the whole area of the glass substrate 11 with the black matrix 13 and the coloring pixels 21 formed thereon with sputtering and without heating. After that, the transparent conductive film on the prescribed position is easily etched and removed with the laser beam and subsequently the transparent conductive film is annealing treated so as to obtain intended characteristics. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
