| 摘要 |
PROBLEM TO BE SOLVED: To provide an automatic polishing device, increasing a pressing force in polishing, improving positioning accuracy, adapted to a material to be polished increased in size, and hardly causing an interference with a recessed material to be polished. SOLUTION: This automatic polishing device includes: a polishing tool 2 for polishing the material 1 to be polished; a vertical feeder 4 for moving up and down a main shaft motor 3 along a vertical shaft using a ball screw mechanism; a pitch rocking device 5 for rocking the material 1 to be polished around a pitch axis; a roll rocking device 6 for rocking the material 1 to be polished around the roll axis; a base 7 loaded with the pitch rocking device 5 and the roll rocking device 6; a lateral translation device 8 for causing the lateral translation of the base 7 in the horizontal plane; and a longitudinal translation device 9 for causing the longitudinal translation of the base 7 in the horizontal plane. Thus, six motors for securing the degree of freedom required for polishing can be disposed to be distributed to the main shaft motor side and the polished material side. COPYRIGHT: (C)2005,JPO&NCIPI |
