| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron beam detection apparatus and an electron tube detecting electrons with excellent response and high sensitivity by preventing deterioration in response speed and reducing noise. <P>SOLUTION: An insulating tube 9 has one end and the other end. An APD 15 is provided outside one end of the tube 9. The other end of the tube 9 is air-tightly connected to an external flange 120 through a stem inner wall 61. Capacitors C1, C2 electrically connected to the APD 15 are provided inside the tube 9. The capacitors C1, C2 eliminate DC components from a signal generated from the APD by detecting the electrons thereby. Since the capacitors C1, C2 are disposed inside the tube 9, the response of an output signal is prevented from being impaired. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
