HELIUM GAS LIQUEFYING DEVICE, AND HELIUM GAS RECOVERING, REFINING AND LIQUEFYING DEVICE

摘要

PROBLEM TO BE SOLVED: To considerably reduce the size and cost of a device producing liquid helium with a small flow rate.

SOLUTION: A cooling head of a compact very low temperature refrigerating machine typified by a GM refrigerating machine, is inserted into a vacuum heat insulation tank in a state of being thermally kept into contact with a helium gas flow channel, and the helium gas in the flow channel is cooled to be lower than a liquefying temperature by the compact very low temperature refrigerating machine to produce the liquid helium. Further a plurality of compact very low temperature refrigerating machines may be used to allow the helium gas flow channel to be thermally brought into contact with each of cooling heads successively in stages.

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