发明名称 SUBSTRATE, ITS MANUFACTURING METHOD, AND ELECTRO-OPTICAL DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To obtain superior transistor characteristics, and at the same time, to reduce off-leak currents. <P>SOLUTION: A substrate constituted by laminating a plurality of layers upon another is provided with a semiconductor layer 1a, and a high-temperature oxidized film layer 12b which is formed as the substrate of the semiconductor layer 1a and has a thickness of≥50 nm. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005086004(A) 申请公布日期 2005.03.31
申请号 JP20030316888 申请日期 2003.09.09
申请人 SEIKO EPSON CORP 发明人 MORI YUKIO
分类号 G02F1/1368;H01L29/786;(IPC1-7):H01L29/786;G02F1/136 主分类号 G02F1/1368
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