| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To shorten the time for processing wherein laminated patterns are formed using liquid droplet discharge means. <P>SOLUTION: The method includes a drawing process wherein a liquid material in which a pattern forming material comprising film-coated particles is dispersed in a dispersing medium is arranged on a substrate using the liquid droplet discharge means, and a baking process wherein the liquid material arranged on the substrate is heated at the temperature above the boiling temperature of the dispersion medium. In the drawing process, a pattern is formed on the substrate including a laminated film of a plurality of kinds of the pattern forming material by repeating the drawing process and the baking process, changing the kinds of the pattern forming material used per every repetition. In the last baking process of the baking processes repeatedly conducted, the baking temperature is above the decomposition temperature of the laminated film, and in the other baking processes the baking temperature is above the boiling point of the dispersion medium and below the decomposition temperature of the laminated film. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
