METHOD OF HEATING FLUID CONTROLLER

摘要

Using heating device (11) incorporating heaters (14, 15) and having a pair of holding members (12, 13) for clamping a fluid controller (1) to be heated from the opposite sides, the fluid controller (1) having a coupling part (4) projecting from the side face of a block-like body (2) and provided with an operation driving section on the top surface is heated. The body (2) of the fluid controller (1) is heated from the opposite side faces while controlling the temperature of the bottom face of the body (2).