| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable good exposure regardless of the in-depth position of a multiphoton absorption medium in multiphoton absorption exposure. <P>SOLUTION: The multiphoton absorption exposure method uses a multiphoton absorption medium 14 which includes a multiphoton absorption material, has a prescribed thickness and causes a photoreaction when it receives light 10 applied from one surface 14a toward the interior. A medium whose reactivity to the exposure light 10 increases gradually from the one surface 14a toward the other surface 14b is used as the multiphoton absorption medium 14. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
