摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide small electronic parts where property variation of circuit parts due to a substrate is prevented, and to provide a manufacturing method of the small electronic parts. <P>SOLUTION: An insulating layer 12 is formed so as to cover the whole surface of the upper part of an insulation substrate (glass-ceramic substrate) 11. On the insulating layer 12, a thin film of a resistor 13 is patterned in a prescribed shape, for example, as a function film for carrying out a prescribed electrical function. In addition, on the resistor 13, the thin film formation of electrodes 14 patterned in a prescribed shape having prescribed intervals is performed. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |