LASER-IRRADIATED THIN FILMS HAVING VARIABLE THICKNESS

摘要

A crystalline film includes a first crystalline region having first film thickness and a first crystalline grain structure; and a second crystalline region having a second film thickness and a second crystalline grain structure. The first film thickness is greater than the second film thickness and the first and second film thicknesses are selected to provide a crystalline region having the degree and orientation of crystallization that is desired for a device component.