| 摘要 |
A fan filter unit with ion bars for a clean room is provided to basically prevent fatal dust and static electricity in producing high-precision requiring products like TFT(thin film transistor)-LCD(liquid crystal display) by employing ion bars and a high-capability filter. The first filter(14) firstly filters the air introduced from the outside. A fan part(10) is composed of a fan(11) for ventilating the introduced air upward. A duct part(20) is composed of a duct(21) and a guide van(22). The duct induces the air introduced from the fan part. The guide van transfers the introduced air to the bending part of the duct without generating vortex. A discharge part(30) includes the second filter(31) and an ion bar(32). The second filter secondly filters the air transferred by the duct part. The ion bar neutralizes and controls the static electricity generated by alternatively discharged positive and negative ions. A transfer part(40) composed of a conveyor(41) to which a dustproof belt is attached is located in a position to which the pressure and velocity of the air discharged through the discharge part can be transferred. A control part(50) is composed of a control box(51) that controls the fan revolution speed of the fan, the quantity of the ions generated by the ion bar, and the driving speed of the conveyor.
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