Modular system for the treatment of process gases containing impurities

摘要

A modular system detoxifies gases arising from a thin-film manufacturing process. The modular system has an electronic unit controlling a gas burner, the feed of effluent process gases, washing fluid, and the feed of gas fuel to the reaction chamber. The assembly has two or more gas processing reactor chamber modules that are operated simultaneously or sequentially within detected parameters. The parameters are detected by sensors. The parameters are temperature, volumetric flow, mass flow and pressure. The modules are identical and provide failure backup for each other.