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发明名称
METHOD AND APPARATUS FOR ASSEMBLING SUBSTRATE
摘要
申请公布号
KR100478991(B1)
申请公布日期
2005.03.30
申请号
KR20020007075
申请日期
2002.02.07
申请人
发明人
分类号
G02F1/13;G02F1/00;G02F1/1333;G02F1/1339;G09F9/00;H01L21/68;(IPC1-7):G02F1/13
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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