| 摘要 |
Disclosed is an alignment method which includes measuring a deviation between a design position and a measurement position, with respect to some of plural alignment execution points upon an object, to be examined, which alignment execution points have predetermined design positions, respectively, applying design positions of some alignment execution points and measured positional deviations to an approximation formula which approximates the relation between design positions and corrected positional deviations, and determining, with respect to each alignment execution point, a correction formula for calculating a corrected positional deviation on the basis of its design position, and performing an alignment procedure to be done with respect to the alignment execution points in accordance with the determined correction formula, wherein the correction formula includes a second or higher order term of design position. |
