Method and apparatus for separating a member

摘要

This invention is to appropriately separate a bonded substrate stack regardless of some distortion in the bonded substrate stack or the like. This separating apparatus includes a first nozzle (120A) which forms a jet with a large width and a second nozzle (120B) which forms a jet with a small width. When the outer portion of a bonded substrate stack (50) is to be separated, a jet formed by the first nozzle (120A) is used. After that, when a portion inside the outer portion is to be separated, a jet formed by the second nozzle (120B) is used.