| 摘要 |
<p>PURPOSE: To efficiently remove water included as an impurity in a substd. hydrazine gas and to refine substd. hydrazine gas in a short time by bringing the substd. hydrazine gas into contact with a synthetic zeolite adsorbent having a specified pore diameter. CONSTITUTION: One or more kinds of substd. hydrazine are prepared selected from among hydrazines having one substituent expressed by RN2 H3 and hydrazines having two substituents expressed by formula R2 N2 H2 , wherein R in each formula represents alkyl or aryl groups. The substd. hydrazine is methylhydrazine, ethylhydrazine, 1,2-diethylhydrazine or the like. Then the substd. hydrazine is diluted with nitrogen, argon or the like to obtain a substd. hydrazine gas, which is brought into contact with an adsorbent comprising synthetic zeolite having a pore diameter corresponding to 3Å(for example, a molecular sieve 3A). Thus, the water content in the substd. hydrazine gas is removed to obtain a refined substd. hydrazine gas of high purity. The refined substd. hydrazine is useful as the source material for a optical semiconductor element or the like.</p> |
