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发明名称
Apparatus for heating wafer
摘要
申请公布号
KR100479942(B1)
申请公布日期
2005.03.30
申请号
KR20020036623
申请日期
2002.06.28
申请人
发明人
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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